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Prof. Burte

Prof. Dr.-Ing. Edmund P. Burte

Fakultät für Elektrotechnik und Informationstechnik (FEIT)
Institut für Mikro- und Sensorsysteme (IMOS)
Gebäude 10, Universitätsplatz 2, 39106 Magdeburg, Gebäude 10, Raum 313
Tel.: +49 391 67 18398
Fax: +49 391 67 12103

Prof. Dr.-Ing. Edmund P. Burte

Fakultät für Elektrotechnik und Informationstechnik (FEIT)
Institut für Mikro- und Sensorsysteme (IMOS)
Gebäude 10, Universitätsplatz 2, 39106 Magdeburg, Gebäude 10, Raum 313
Tel.: +49 391 67 18398
Fax: +49 391 67 12103
Projekte

Aktuelle Projekte

Abgeschlossene Projekte

Publikationen

2017

Begutachteter Zeitschriftenartikel
Harmgarth, Nicole;  Liebing, Phil;  Zörner, Florian;  Silinskas, Mindaugas;  Burte, Edmund P.;  Edelmann, Frank T. 

Synthesis and crystal structures of the first antimony(III) aziridinides
In: Inorganic chemistry - Washington, DC: American Chemical Society, Bd. 56.2017, 8, S. 4267-4270; http://dx.doi.org/10.1021/acs.inorgchem.7b00523

Dissertation
SabriAlirezaei, Iman;  Burte, Edmund P. [AkademischeR BetreuerIn] 

A monolithically integrated butt-coupled 3D bulk-CMOS silicon photodetector array with a fiber-to-chip couplers platform on a single-chip
In: Magdeburg, 2017, xvii, 116 Seiten, Illustrationen ; [Literaturverzeichnis: Seite 103-116]

2016

Begutachteter Zeitschriftenartikel
Akinwumi Abimbola, Amusan;  Kalkofen, Bodo;  Gargouri, Hassan;  Wandel, Klaus;  Pinnow, Cay;  Lisker, Marco;  Burte, Edmund P. 

Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
In: Journal of vacuum science & technology / A. - New York, NY : Inst; Vol. 34.2015, 1, Art. 01A126, 2016

Boutejdar, A.;  Eltabit, N. M.;  Ibrahim, A. A.;  Burte, Edmund P.;  Abdalla, M. A. 

New compact dual bandpass filter using coupled double-ring resonators and DGS-technique
In: Applied Computational Electromagnetics Society journal. - Monterey, Calif, Bd. 31.2016, 1, S. 132-137

Mikuta, Reinhard;  Silinskas, Mindaugas;  Bourouis, Riad;  Kloos, Sven;  Burte, Edmund P. 

Characterization of non-dispersive infrared gas detection system for multi gas applications
In: Technisches Messen : tm ; Sensoren, Geräte, Systeme ; Organ des AMA Fachverbands für Sensorik e.V. und der NAMUR, Normenarbeitsgemeinschaft für Mess- und Regelungstechnik der Chemischen Industrie. - Berlin : De Gruyter, Bd. 83.2016, 7/8, S. 410-416

Yeh, Chia-Pin;  Lisker, Marco;  Kalkofen, Bodo;  Burte, Edmund P. 

Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM
In: AIP Advances. - New York, NY : American Inst. of Physics; Vol. 6.2016, 3, Art. 035128, insgesamt 13 S.

Yeh, Chia-Pin;  Lisker, Marco;  Kalkofen, Bodo;  Burte, Edmund P. 

High temperature reactive ion etching of iridium thin films with aluminum mask in CF 4/O 2/Ar plasma
In: AIP Advances. - New York, NY : American Inst. of Physics; Vol. 6.2016, 8, Art. 085111

Buchbeitrag
Boutejdar, A.;  Challal, M.;  Wael, A. A.;  Ibrahim, A.;  Burte, Edmund P. 

Compact LPF to UWB BPF transition employing quasi-triangular DGS resonators and a discontinuity on the microstrip feed line
In: 2015 4th International Conference on Electrical Engineering (ICEE) : 13 - 15 December 2015, Boumerdes, Algeria. - IEEE, insges. 4 S., 2016

Boutejdar, A.;  Ibrahim, A.;  Challal, M.;  Wael, A. A.;  Burte, Edmund P. 

Extracting of compact tunable BPF from LPF using single T-DGS-resonator and 0.25PF/0.5PF Chip Monolithic Ceramic Capacitors
In: 2015 4th International Conference on Electrical Engineering (ICEE) : 13 - 15 December 2015, Boumerdes, Algeria. - IEEE, insges. 5 S., 2016

2015

Begutachteter Zeitschriftenartikel
Boutejdar, Ahmed;  Ibrahim, Ahmed A.;  Burte, Edmund P. 

Design of a novel ultrawide stopband lowpass filter using a DMS-DGS technique for radar applications
In: International journal of microwave science and technology. - New York, NY [u.a.] : Hindawi Publ. Corp; 2015, Art. ID 101602, insgesamt 7 S.

Kalkofen, Bodo;  Amusan, Akinwumi A.;  Bukhari, Muhammad S. K.;  Garke, Bernd;  Lisker, Marco;  Gargouri, Hassan;  Burte, Edmund P. 

Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
In: Journal of vacuum science & technology / A. - New York, NY : Inst; Vol. 33.2015, 3, Art.031512, insgesamt 12 S.

Khorkhordin, Oleksandr;  Yeh, Chia-Pin;  Kalkofen, Bodo;  Burte, Edmund P. 

Enhanced ferroelectric properties of multilayer SBT-BTN thin films for NVRAM applications
In: Journal of crystallization process and technology : JCPT. - Irvine, Calif : Scientific Research Publ. Inc, Bd. 5.2015, 4, S. 49-57

Yeh, Chia-Pin;  Lisker, Marco;  Bläsing, Jürgen;  Khorkhordin, Oleksandr;  Kalkofen, Bodo;  Burte, Edmund P. 

Deposition of iridium thin films on three-dimensional structures with PE-MOCVD
In: Chemical vapor deposition : CVD. - Weinheim : Wiley-VCH, Bd. 21.2015, 1/3, S. 46-53

2014

Begutachteter Zeitschriftenartikel
Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund 

High-performance wide stop band low-pass filter using a vertically coupled DGS-DMS-resonators and interdigital capacitor
In: Microwave and optical technology letters. - New York, NY [u.a.] : Wiley, Bd. 56.2014, 1, S. 87-91

Kalkofen, Bodo;  Amusan, A. A.;  Lisker, M.;  Burte, Edmund P. 

Application of atomic layer deposited dopant sources for ultra-shallow doping of silicon
In: Physica status solidi. - Berlin : Wiley-VCHPhysica status solidi / C, Bd. 11.2014, 1, S. 41-45

Tutacz, P.;  Syre, R.;  Hrib, Cristian G.;  Hilfert, Liane;  Frenzel, N.;  Burte, Edmund P.;  Kühling, M.;  Edelmann, Frank T. 

The first aziridinylguanidinates - new precursors for potentially volatile metal guanidinates
In: Australian journal of chemistry. - Melbourne : CSIRO, Bd. 67.2014, 7, S. 1110-1114

2013

Artikel in Kongressband
Boutejdar, Ahmed;  Darwish, Abderahman;  Omar, Abbas;  Burte, Edmund 

A new design of a reconfigurable band pass filter based on octagonal resonators, varactor devices and lumped-low pass filter for blocking R
In: RADCOM 2013. - Gerotron Communication, insges. 23 S., 2012 ; Kongress: RADCOM; (Hamburg) : 2013.04.24-25

Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund 

Design and realization of a novel ultra wide stop band low pass filter using quasi-yagi-DGS-element and parallel compensated capacitors
In: RADCOM 2013. - Gerotron Communication, insges. 16 S. ; Kongress: RADCOM; (Hamburg) : 2013.04.24-25

Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund P. 

Design of new compact multi-band pass filters using multi-armed split ring resonators with direct feed
In: Hochfrequenztechnik, Komponenten, Module und EMV, Medizintechnik und drahtlose Gesundheitsassistenzsysteme. - Gerotron Communication, 2013 ; Kongress: EEEfCOM 2013; (Ulm) : 2013.07.08-09

Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund P.;  Winkler, Dennis 

The cause of the different losses in microstrip structure and approach process to their minimization
In: Hochfrequenztechnik, Komponenten, Module und EMV, Medizintechnik und drahtlose Gesundheitsassistenzsysteme. - Gerotron Communication, 2013 ; Kongress: EEEfCOM 2013; (Ulm) : 2013.07.08-09

Begutachteter Zeitschriftenartikel
Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund 

Design and optimization of new compact tunable 2.4-GHz band pass filter using coupled [lambda]/2 microstrip open-loop resonators and mems-switch technique
In: Microwave and optical technology letters. - New York, NY [u.a.] : Wiley, Bd. 55.2013, 10, S. 2444-2450

Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund P. 

LPF builds on quasi-yagi DGS
In: Microwaves & RF. - Cleveland, Ohio : Penton, Bd. 4.2013, 9, S. 52-58

Kalkofen, Bodo;  Amusan, Akinwumi A.;  Lisker, Marco;  Burte, Edmund P. 

Investigation of oxide thin films deposited by atomic layer deposition as dopant source for ultra-shallow doping of silicon
In: Microelectronic engineering. - [S.l.] ] : Elsevier, Bd. 109.2013, S. 113-116

Syre, Ronny;  Frenzel, Nancy;  Hrib, Cristian G.;  Burte, Edmund P.;  Jones, Peter G.;  Edelmann, Frank T. 

Di-[mu]-oxido-bis[bis(diisopropylacetamidinato)-[kappa]N;[kappa] 2N,N'-germanium(IV)]
In: Acta crystallographica. - Copenhagen : MunksgaardActa crystallographica / E; Vol. E69.2013, 12, S. m686-m687

2012

Begutachteter Zeitschriftenartikel
Boutejdar, Ahmed;  Boutejdar, Sonja;  Omar, Abbas;  Burte, Edmund 

Design of planar/coplanar compact bBand-stop filter using SGS resonators and multi-interdigital capacitors
In: Recent patents on electrical & electronic engineering. - Sharjah : Bentham Science, Bd. 5.2012, 3

Kalkofen, Bodo;  Mothukuru, Venu Madhav;  Klingsporn, Max;  Burte, Edmund P. 

Investigation of antimony oxide films deposited by atomic layer deposition
In: ECS transactions. - Pennington, NJ, Bd. 45.2012, 3, S. 461-473

Kalkofen, Bodo;  Mothukuru, Venu Madhav;  Lisker, Marco;  Burte, Edmund P. 

P-type doping of silicon suitable for structures with high aspect ratios by using a dopant source of boron oxide grown by atomic layer deposition
In: ECS transactions. - Pennington, NJ, Bd. 45.2012, 6, S. 55-67

Buchbeitrag
Batmanov, Anatoliy;  Burte, Edmund;  Mikuta, Reinhard;  Boutejdar, Ahmed;  Khaidurova, A. 

Design of coplanar bandstop filter based on open-loop-ring resonator and DGS for WLAN and UWB applications
In: 42nd European Microwave Conference (EuMC), 2012. - Piscataway, NJ : IEEE, S. 1123-1126

2011

Artikel in Kongressband
Boutejdar, Ahmed;  Omar, Abbas;  Senst, Michael;  Burte, Edmund P.;  Batmanov, Anatoliy;  Mikuta, Reinhard 

A new design of a tunable WLAN-band pass filter using a combination of varactor device, RF-choke and hairpin-defected ground structure
In: Hochfrequenztechnik, Komponenten, Module und EMV, Medizintechnik und drahtlose Gesundheitsassistenzsysteme. - Gerotron Communication, insges. 23 S., 2011 ; Kongress: EEEfCOM 2011; (Ulm) : 2011.05.25-26

Boutejdar, Ahmed;  Omar, Abbas;  Winkler, Dennis;  Burte, Edmund;  Mikuta, Reinhard.;  Batmanov, Anatoliy 

A new technique to transform a fractal low-pass to band-pass filter using a simple combination of defected ground structure (DGS) and gap capacitive
In: RADCOM 2011. - Gerotron Communication, insges. 22 S. ; Kongress: RADCOM; (Hamburg) : 2011.04.06-07

Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund;  Winkler, Dennis 

Improvement of quasi-elliptic DGS band-pass filter using multilayer-technique and coupling matrix method
In: RADCOM 2011. - Gerotron Communication, insges. 42 S. ; Kongress: RADCOM; (Hamburg) : 2011.04.06-07

Begutachteter Zeitschriftenartikel
Reso, Denis;  Silinskas, Mindaugas;  Kalkofen, Bodo;  Burte, Edmund P. 

Hot wire chemical vapor deposition of Ge 2Sb 2Te 5 thin films
In: Journal of the Electrochemical Society. - Pennington, NJ : Electrochemical Soc, Bd. 158.2011, 3, S. 187-190

Originalartikel in begutachteter internationaler Zeitschrift
Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund;  Batmanov, Anatoliy;  Mikuta, Reinhard 

A new logarithmic method to minimize the size of low-pass filter using multilayer and defected ground structure technique
In: Microwave and optical technology letters. - New York, NY [u.a.] : Wiley, Bd. 53.2011, 11, S. 2561-2566

Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund P.;  Mikuta, Reinhard 

An improvement of defected ground structure lowpass/bandpass filters using H-slot resonators and coupling matrix method
In: Journal of microwaves, optoelectronics and electromagnetic applications [[Elektronische Ressource]]. - Brasilia : SBMO, Bd. 10.2011, 2, S. 295-307

Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund P.;  Mikuta, Reinhard 

Design of compact ultra-wide stopband lowpass filter using a U-Slotted Ground Structure (SGS) and multilayer-technique
In: Recent patents on electrical engineering. - Sharjah : Bentham Science, Bd. 4.2011, 2, S. 139-144

Boutejdar, Ahmed;  Eltabit, Nuri M.;  Burte, Edmund P.;  Omar, Abbas;  Parui, Susanta K. 

Design of novel 4-GHz bandpass filter using a combination of defected ground structure resonators and admittance J-inverter
In: Recent patents on electrical engineering. - Sharjah : Bentham Science, Bd. 4.2011, 1, S. 42-49

Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund P.;  Mikuta, Reinhard;  Batmanov, Anatoliy 

DGS and multilayer methods make LPF
In: Microwaves & RF. - Cleveland, Ohio : Penton, 3, S. 61-68, 2011

Boutejdar, Ahmed;  Burte, Edmund P.;  Omar, Abbas 

Small-sized quasi-elliptic parallel coupled band pass filter using microstrip discontinuity corrections and multilayer-technique
In: Microwave and optical technology letters. - New York, NY [u.a.] : Wiley, Bd. 53.2011, 10, S. 2433-2438

2010

Artikel in Kongressband
Boutejdar, Ahmed;  Winkler, Dennis A.;  Burte, Edmund P.;  Omar, Abbas 

Design, Optimierung und Herstellung von kompakten HF-Mikrostreifen-Filtern mittels "Defected Ground Structure" DGS-Technik und Kopplungsmatrixmethode
In: Hochfrequenztechnik, Komponenten, Module und EMV . - Gerotron Communication, insges. 42 S., 2010 ; Kongress: EEEfCOM 2010; (Ulm) : 2010.06.16-17

Boutejdar, Ahmed;  Burte, Edmund P.;  Omar, Abbas 

Entwurf, Optimierung und Vermessung eines Lowpass-Filters mittels oktagonalen Ring-DGS-Resonatoren und Interdigital Kapazität
In: Hochfrequenztechnik, Komponenten, Module und EMV . - Gerotron Communication, insges. 43 S., 2010 ; Kongress: EEEfCOM 2010; (Ulm) : 2010.06.16-17

Gewalt, A.;  Kalkofen, Bodo;  Silinskas, Mindaugas;  Lisker, M.;  Burte, Edmund P. 

Plasma enhanced chemical vapor deposition of gallium on different substrates for silicon nanowire synthesis
In: Program and materials // 3rd International Conference Radiation Interaction with Material and its Use in Technologies 2010, Kaunas, Lithuania, 20 - 23 September, 2010. - Kaunas : Technologija, S. 266-269 ; Kongress: International Conference Radiation Interaction with Material and its Use in Technologies 2010; 3 (Kaunas) : 2010.09.20-23

Begutachteter Zeitschriftenartikel
Gewalt, A.;  Kalkofen, Bodo;  Lisker, M.;  Burte, Edmund P. 

Gallium assisted PECVD synthesis of silicon nanowires
In: ECS transactions. - Pennington, NJ, Bd. 28.2010, 15, S. 45-56

Gewalt, Annika;  Kalkofen, Bodo;  Lisker, Marco;  Burte, Edmund P. 

PECVD synthesis of silicon nanowires assisted by templates of gallium islands
In: MRS online proceedings library. - Warrendale, Pa : MRS, Bd. 1258.2010, S. 91-96

Buchbeitrag
Batmanov, Anatoliy;  Boutejdar, Ahmed;  Balalem, Atallah;  Omar, Abbas;  Burte, Edmund P. 

New coplanar low-pass defected ground structure (DGS) filter
In: Ultra-wideband, short-pulse electromagnetics 9 . - New York, NY : Springer, ISBN 978-0-387-77844-0, S. 175-184, 2010 ; Kongress: Conference on Ultra-Wideband Short-Pulse Electromagnetics; 9 (Lusanne) : 2008.07.21-25

Boutejdar, Ahmed;  Batmanov, Anatoliy;  Omar, Abbas;  Burte, Edmund P. 

A miniature 3.1 GHz microstrip bandpass filter with suppression of spurious harmonics using multilayer technique and defected ground structure open-loop ring
In: Ultra-wideband, short-pulse electromagnetics 9 . - New York, NY : Springer, ISBN 978-0-387-77844-0, S. 191-200, 2010 ; Kongress: Conference on Ultra-Wideband Short-Pulse Electromagnetics; 9 (Lusanne) : 2008.07.21-25

Reso, Denis;  Silinskas, Mindaugas;  Kalkofen, Bodo;  Lisker, M.;  Burte, Edmund P. 

Activated pulsed metalorganic chemical vapor deposition of Ge 2Sb 2Te 5 thin films using alkyl precursors
In: Phase-change materials for memory and reconfigurable electronics applications. - Red Hook, NY : Curran, S. 74-79, 2010 - (Materials Research Society symposium proceedings; 1251) ; Kongress: MRS spring meeting; (San Francisco, Calif.) : 2010.04.05-09

Originalartikel in begutachteter internationaler Zeitschrift
Batmanov, Anatoliy;  Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund P. 

Design of compact coplanar bandstop filter composed on open-loop-ring resonator and defected ground structure (DGS)
In: Microwave and optical technology letters . - New York, NY [u.a.] : Wiley, Bd. 52.2010, 2, S. 478 - 483

Boutejdar, Ahmed;  Batmanov, Anatoliy;  Awida, M. H.;  Burte, Edmund P.;  Omar, Abbas 

Design of a new bandpass filter with sharp transition band using multilayer-technique and U-defected ground structure
In: Institution of Engineering and Technology : IET microwaves, antennas & propagation . - London : IET, Bd. 4.2010, 9, S. 1415-1420

Boutejdar, Ahmed;  Abdel-Rahman, A.;  Batmanov, Anatoliy;  Burte, Edmund P.;  Omar, Abbas 

Miniaturized band-stop filter based on multilayer-technique and new coupled octagonal defected ground structure with interdigital capacitor
In: Microwave and optical technology letters . - New York, NY [u.a.] : Wiley, Bd. 52.2010, 3, S. 510-514

2009

Artikel in Kongressband
Batmanov, Anatoliy;  Boutejdar, Ahmed;  Omar, Abbas;  Burte, Edmund P. 

Design of compact low-pass filters using cascaded arrowhead DGS slots for microstrip line and CPW applications
In: International Workshop on Microwave Filters ; 16 - 18 November 2009, CNES, Toulouse, France . - Toulouse, insges. 4 S. ; Kongress: International Workshop on Microwave Filters; (Toulouse) : 2009.11.16-18

Begutachteter Zeitschriftenartikel
Kalkofen, Bodo;  Matichyn, Serhiy;  Burte, Edmund P. 

Atomic layer deposition of antimony oxide on hydrogen-terminated silicon substrates
In: ECS transactions. - Pennington, NJ, Bd. 19.2009, 1, S. 105-114

Lisca, Marian;  Kalkofen, Bodo;  Lisker, Marco;  Burte, Edmund P.;  Szymań  ska, Iwona;  Szł  yk, Edward 

Silver films deposited by liquid-delivery MOCVD using (Tertbutylcarboxylate)(Triethylphosphine) silver with toluene as the solvent
In: ECS transactions. - Pennington, NJ, Bd. 25.2009, 8, S. 1039-1046

Buchbeitrag
Gewalt, A.;  Kalkofen, Bodo;  Lisker, M.;  Burte, Edmund P. 

Epitaxial growth of Si nanowires by a modified VLS method using molten Ga as growth assistant
In: Nanowires - synthesis, properties, assembly and applications. - Warrendale, Pa. : MRS, S. 13-18, 2009 ; Kongress: MRS fall meeting; (Boston, Mass.) : 2008.12.01-05

Originalartikel in begutachteter zeitschriftenartiger Reihe
Batmanov, Anatoliy;  Burte, Edmund P.;  Boutejdar, Ahmed;  Omar, Abbas Sayed 

Quasi-fractal periodic defected ground structure for CPW lines
In: GeMiC <2009, München> : German Microwave Conference . - Berlin [u.a.] : VDE-Verl., ISBN 978-3-8007-3150-3, insges. 3 S.; ITG-Fachbericht; 213 ; Kongress: GeMiC 2009; (München) : 2009.03.16-18

Boutejdar, Ahmed;  Omar, Abbas Sayed;  Batmanov, Anatoliy;  Burte, Edmund P. 

Design of compact low-pass filter with with wide rejection band using cascaded arrowhead-dgs and multilayer-techni
In: GeMiC <2009, München> : German Microwave Conference . - Berlin [u.a.] : VDE-Verl., ISBN 978-3-8007-3150-3, insges. 4 S.; ITG-Fachbericht; 213 ; Kongress: GeMiC 2009; (München) : 2009.03.16-18

Boutejdar, Ahmed;  Omar, Abbas Sayed;  Batmanov, Anatoliy;  Burte, Edmund P. 

New low-pass filter design using compensated microstrip capacitor and coupled meander defected ground structure (DGS)
In: GeMiC <2009, München> : German Microwave Conference . - Berlin [u.a.] : VDE-Verl., ISBN 978-3-8007-3150-3, insges. 4 S.; ITG-Fachbericht; 213 ; Kongress: GeMiC 2009; (München) : 2009.03.16-18

2008

Buchbeitrag
Batmanov, Anatoliy;  Boutejdar, Ahmed;  Omar, Abbas Sayed;  Burte, Edmund P. 

Miniaturized coplanar bandpass/bandstop filter using meander serpentine shape shunt/open-stubs
In: Proceedings of the 38th European Microwave Conference, EuMC as part of the European Microwave Week, EuMW 2008 . - EuMA, ISBN 978-2-87487-006-4, S. 222-225 ; Kongress: EuMC; 38 (Amsterdam) : 2008.10.27-31 ; [EuMC as part of the European Microwave Week, EuMW 2008]

Boutejdar, Ahmed;  Batmanov, Anatoliy;  Elsherbini, A.;  Burte, Edmund P.;  Omar, Abbas Sayed 

A new compact tunable bandpass filter using defected ground structure with active devices
In: IEEE Antennas and Propagation Society International Symposium, 2008, AP-S 2008 . - IEEE Operations Center, ISBN 978-1-424-42041-4, insges. 4 S.

Boutejdar, Ahmed;  Batmanov, Anatoliy;  Burte, Edmund P.;  Omar, Abbas 

A new method to improve the rejectband of a 5.6 GHz bandstop filter using [Lambda]/2 open-loop ring microstrip resonators
In: Asia-Pacific Microwave Conference, 2008 . - Piscataway, NJ : IEEE, ISBN 978-1-424-42641-6, insges. 4 S.; Abstract unter URL: http://dx.doi.org/10.1109/APMC.2008.4958257 ; Kongress: APMC; 20 (Hong Kong; Macau) : 2008.12.16-20

Boutejdar, Ahmed;  Batmanov, Anatoliy;  Elsherbini, A.;  Omar, Abbas Sayed;  Burte, Edmund P. 

A simple method to control the reject band of microstrip low pass filter using a new multi-ring defected ground structures (DGS)
In: IEEE Antennas and Propagation Society International Symposium, 2008, AP-S 2008 . - IEEE Operations Center, ISBN 978-1-424-42041-4, insges. 4 S.

Boutejdar, Ahmed;  Batmanov, Anatoliy;  Omar, Abbas;  Burte, Edmund P. 

Design of compact low-pass filter using cascaded arrowhead-DGS and multilayer-technique
In: Asia-Pacific Microwave Conference, 2008 . - Piscataway, NJ : IEEE, ISBN 978-1-424-42641-6, insges. 4 S.; Abstract unter URL: http://dx.doi.org/10.1109/APMC.2008.4958256 ; Kongress: APMC; 20 (Hong Kong; Macau) : 2008.12.16-20

Originalartikel in begutachteter internationaler Zeitschrift
Yeh, C. P.;  Lisker, M.;  Vezin, V.;  Seitzinger, B.;  Baumann, P. K.;  Garke, Bernd;  Bläsing, Jürgen;  Krost, Alois;  Burte, Edmund P. 

Fabrication of ferroelectric PZT thin by liquid delivery MOCVD using novel Zr andTi precursors
In: Integrated ferroelectrics . - Philadelphia, Pa. [u.a.] : Gordon and Breach Science Publ., Bd. 104.2008, 1, S. 16-24

2007

Originalartikel in begutachteter zeitschriftenartiger Reihe
Batmanov, Anatoliy;  Spiliotis, Nikolaos;  Boutejdar, Ahmed;  Burte, Edmund P.;  Omar, Abbas Sayed 

Control of bandwidth and resonant frequency of a new coplanar bandpass filter
In: \"Technology convergence . - Piscataway NJ : IEEE Service Center, S. 5, 2007 ; [Asia-Pacific Microwave Conference ; (Bangkok, Thailand) : 2007.12.11-14]

Batmanov, Anatoliy;  Boutejdar, Ahmed;  Burte, Edmund P.;  Omar, Abbas Sayed 

New compact MEMS-switch controlled tunable DGS coplanar bandpass filter
In: ESSDERC 2007 - ESSCIRC 2007 . - Piscataway, NJ : IEEE Service Center, ISBN 1-424-41124-6, S. 438-441 ; [ESSDERC 2007 ; 37 (Munich, Germany) : 2007.09.11-13]

2006

Begutachteter Zeitschriftenartikel
Kalkofen, Bodo;  Burte, Edmund P. 

Sheet resistance increase of shallow doped silicon during native oxidation in air
In: ECS transactions. - Pennington, NJ, Bd. 3.2006, 2, S. 9-17

Silinskas, Mindaugas;  Lisker, Marco;  Matichyn, Serhiy;  Kalkofen, Bodo;  Burte, Edmund P. 

Optimization of electric proberties of high-k zirconium dioxide by varying deposition and annealing conditions
In: Materials science in semiconductor processing. - Amsterdam [u.a.] : Elsevier Science, Bd. 9.2006, 6, S. 1037-1042

Buchbeitrag
Burte, Edmund P.;  Mikuta, Reinhard;  Kuhlemann, Gerd;  Urban, Jens 

128 pixel infrared focal plane array produced in pure CMOS technology
In: XX Eurosensors; Vol. 2: . - Göteborg, S. 66-67, 2006 ; Kongress: Eurosensors; 20 (Göteborg, Sweden) : 2006.09.17-20 ; Anniversary; : 20 (Göteborg, Sweden) : 2006.09.17-20

Mikuta, Reinhard;  Kuhlemann, Gerd;  Burte, Edmund P.;  Urban, Jens 

Infrarotsensorarray für die Personenerfassung
In: Information technology and electrical engineering - devices and systems, materials and technologies for the future . - Ilmenau : Verl. ISLE, ISBN 3-938843-15-2, insges. 18 S., 2006 ; Kongress: Internationales Wissenschaftliches Kolloquium (IWK). Technische Universität Ilmenau; 51 (Ilmenau) : 2006.09.11-15

Pannicke, Diana;  Hirsch, Sören;  Mikuta, Reinhard;  Burte, Edmund Paul;  Schmidt, Bertram 

Research on an under-bump-metallization for lead free flip-chip-process
In: Information technology and electrical engineering - devices and systems, materials and technologies for the future. - Ilmenau : Verl. ISLE, 2006 ; Kongress: Internationales Wissenschaftliches Kolloquium (IWK). Technische Universität Ilmenau; 51 (Ilmenau) : 2006.09.11-15

Originalartikel in begutachteter internationaler Zeitschrift
Kalkofen, Bodo;  Burte, Edmund P. 

Observation of steplike sheet resistance increase of shallow doped bare silicon during initial contact to air
In: Nuclear instruments &amp;amp;amp;amp;amp;amp; methods in physics research . - Amsterdam [u.a.] : Elsevier, ISSN 0168-583x, Bd. 253.2006, 1/2, S. 232-235

Silinskas, Mindaugas;  Lisker, Marco;  Kalkofen, Bodo;  Burte, Edmund P. 

Investigation of strontium tantalate thin films for high-k gate dielectric applications
In: Materials science in semiconductor processing . - Oxford [u.a.] : Pergamon, Elsevier Science, Bd. 9.2006, 6, S. 1102-1107

Silinskas, Mindaugas;  Lisker, Marco;  Matichyn, Serhiy;  Burte, Edmund P.;  Hyeon, J.-Y.;  Lorenz, Volker;  Edelmann, Frank T. 

Strontium bismuth tantalate thin film deposition by liquid-delivery MOCVD using novel liquid bismuth precursors
In: Integrated ferroelectrics . - Philadelphia, Pa. [u.a.] : Gordon and Breach Science Publ., Bd. 79.2006, S. 195-202

Originalartikel in begutachteter nationaler Zeitschrift
Mikuta, Reinhard;  Wennmacher, Christian;  Burte, Edmund P. 

Messanordnung zur kapazitiven Luft- und Gasfeuchtemessung
In: Technisches Messen . - München : Oldenbourg, ISSN 0340-837x, Bd. 73.2006, 11, S. 611-616

Originalartikel in begutachteter zeitschriftenartiger Reihe
Batmanov, Anatoliy;  Hamad, Ehab K. I.;  Burte, Edmund P.;  Omar, Abbas 

Design of h-shaped low actuation-voltage RF-MEMS switches
In: Proceedings of Asia-Pacific Microwave Conference December 12-15, 2006 . - Japan : IEICH, insges. 4 S. ; Kongress: Asia-Pacific Microwave Conference; (Yokohama, Japan) : 2006.12.12-15 ; APMC; (Yokohama, Japan) : 2006.12.12-15 ; [APMC 2006]

2005

Begutachteter Zeitschriftenartikel
Silinskas, Mindaugas;  Lisker, Marco;  Kalkofen, Bodo;  Matichyn, S.;  Garke, Bernd;  Burte, Edmund P. 

Preparation of strontium bismuth tantalate thin film by liquid-delivery metalorganic chemical vapor deposition
In: MRS online proceedings library. - Warrendale, Pa : MRS, Bd. 830.2005, S. 319-324

Buchbeitrag
Hur&#697;  yeva, T.;  Lisker, Marco;  Silinskas, Mindaugas;  Burte, Edmund P.;  Kalkofen, Bodo;  Matichyn, S. 

Preparation of silver thin films from vinyltriethylsilane(hexafluoroacetylacetonato)silver(I) using liqiud-delivery metalorganic chemical vapor deposition
In: EUROCVD-15. - Pennington, NJ : Electrochemical Society, S. 683-690, 2005 - (Electrochemical Society; 2005-9) ; Kongress: EUROCVD; 15 (Bochum) : 2005.09.05-09

Lisker, Marco;  Silinskas, Mindaugas;  Matichyn, S.;  Dargis, R.;  Kalkofen, Bodo;  Burte, Edmund P. 

Structural and electrical characterization of Zirconium oxide thin films deposited by MOCVD
In: Silicon nitride, silicon dioxide thin insulating films, and other emerging dielectrics VIII. - Pennington, NJ : Electrochemical Society, S. 418-425, 2005 ; Kongress: Meeting of the Electrochemical Society (ECS); 207 (Québec) : 2005.05.16-20

Mikuta, Reinhard;  Wennmacher, Christian;  Burte, Edmund P. 

Sensor zur Messung der Windgeschwindigkeit mit digitalem Ausgangssignal.
In: Technische Universität Ilmenau (Veranst.) ; Scharff, Peter (Hrsg.): Mechanical engineering from macro to nano(50. Internationales Wissenschaftliches Kolloquium Ilmenau 19. - 23.09. 2005). - proceedings. Ilmenau : Verl. ISLE, 2005, S. 267 - 268

Mikuta, Reinhard;  Wennmacher, Christian;  Burte, Edmund P. 

Sensor zur Messung der Windgeschwindigkeit mit digitalem Ausgangssignal.
In: Technische Universität Ilmenau (Veranst.): 50. IWK 19.-23.09.2005. IMEKO 21.- 24.09.2005. AMAN 25.-30.09.2005 : Tagungsunterlagen. Ilmenau : Techn. Univ., 2005, 12 S., [Elektronische Ressource]

Originalartikel in begutachteter internationaler Zeitschrift
Hyeon, Ji-Young;  Lisker, Marco;  Silinskas, Mindaugas (ext.);  Burte, Edmund;  Edelmann, Frank T. 

Liquid-Delivery MOCVD of Strontium Bismuth tantalate thin films using Sr[Ta(OC2H5)5(OCH2CH2OCH3)]2 and liquid Bi(CH2CH=CH2)3 as precursors.
In: Chemical vapor deposition : CVD [Weinheim] 11(2005), Nr. 4, S. 213 - 218

Kalkofen, Bodo;  Lisker, Marco;  Burte, Edmund P. 

Phosphorus diffusion into silicon after vapor phase surface adsorption of phosphine.
In: Materials science &amp;amp;amp;amp;amp;amp; engineering, B = Solid state materials for advanced technology [New York, NY] 124-125(2005), S. 288 - 292

Lisker, Marco;  Silinskas, Mindaugas;  Matichyn, S.;  Burte, Edmund P. 

Electrical characterization of zirconium oxide layers grown by liquid delivery MOCVD.
In: Integrated ferroelectrics [Philadelphia] 74(2005), S. 113 - 122

Originalartikel in begutachteter zeitschriftenartiger Reihe
Huryeva, J.Tetyana;  Lisker, Marco;  Silinskas, Mindaugas;  Burte, Edmund P.;  Kalkofen, Bodo;  Matichyn, S. 

Preparation of silver thin films from vinyltriethysilane (hexafluroacetylacetonato) silver (I) using liquid-delivery metalorganic chemical vapor deposition.
In: Devi, Anjana (Hrsg.) ; ... (Hrsg.): Chemical vapor deposition, EUROCVD 15(15 european conference, Bochum, Germany, 5th to 9th September 2005). - proceedings. Pennington, NJ : Electrochemical Society, 2005, S. 683 - 690 (Proceedings volume // Electrochemical Society 2005-9)

Kalkofen, Bodo;  Lisker, Marco;  Burte, Edmund P. 

Shallow doping of silicon from an adsorbed phosphorus surface layer.
In: Gusev, Evgeni P. (Hrsg.) ; ... (Hrsg.): Advanced gate strack, source/drain and channel engineering for Si-based CMOS : new materials, processes, and equipment (international symposium Quebec City, Canada May 16 - 18 2005). - proceedings. Pennington, NJ : Electrochemical Society, 2005, S. 99 - 106 (Proceedings volume // Electrochemical Society 2005-5)

Lisker, Marco;  Silinskas, Mindaugas;  Kalkofen, Bodo;  Burte, Edmund P. 

Improvement of electrical properties of high-k strontium tantalate films for gate dielelectric applications.
In: Gusev, Evgeni P. (Hrsg.) ; ... (Hrsg.): Advanced gate strack, source/drain and channel engineering for Si-based CMOS : new materials, processes, and equipment (international symposium Quebec City, Canada May 16 - 18 2005). - proceedings. Pennington, NJ : Electrochemical Society, 2005, S. 426 - 433 (Proceedings volume // Electrochemical Society 2005-5)

Lisker, Marco;  Silinskas, Mindaugas;  Matichyn, S.;  Dargis, Rytis;  Kalkofen, Bodo;  Burte, Edmund P. 

Structural and electrical characterization of zirconium oxide thin films deposited by mocvd.
In: Gusev, Evgeni P. (Hrsg.) ; ... (Hrsg.): Advanced gate strack, source/drain and channel engineering for Si-based CMOS : new materials, processes, and equipment (international symposium Quebec City, Canada May 16 - 18 2005). - proceedings. Pennington, NJ : Electrochemical Society, 2005, S. 418 - 425 (Proceedings volume // Electrochemical Society 2005-5)

Matichyn, S.;  Lisker, Marco;  Silinskas, Mindaugas;  Burte, Edmund P. 

Investigation of the structural and electrical properties of ferroelectric PbZrxTi1-xO3 (PZT) thin films grown using liquid-delivery metalorganic chemical vapor deposition.
In: Devi, Anjana (Hrsg.) ; ... (Hrsg.): Chemical vapor deposition, EUROCVD 15(15 european conference, Bochum, Germany, 5th to 9th September 2005). - proceedings. Pennington, NJ : Electrochemical Society, 2005, S. 857 - 864 (Proceedings volume // Electrochemical Society 2005-9)

Silinskas, Mindaugas;  Lisker, Marco;  Matichyn, S.;  Burte, Edmund;  Hyeon, Ji-Young;  Lorenz, Volker;  Edelmann, Frank T. 

Liquid-delivery MOCVD of SBT thin films using novel bismuth precursors.
In: Devi, Anjana (Hrsg.) ; ... (Hrsg.): Chemical vapor deposition, EUROCVD 15(15 european conference, Bochum, Germany, 5th to 9th September 2005). - proceedings. Pennington, NJ : Electrochemical Society, 2005, S. 881 - 888 (Proceedings volume // Electrochemical Society 2005-9)

Silinskas, Mindaugas;  Lisker, Marco;  Kalkofen, Bodo;  Matichyn, S.;  Garke, Bernd;  Burte, Edmund 

Preparation of strontium bismuth tantalate thin film by liquid-delivery metalorganic chemical vapor desposition.
In: Claverie, A. (Hrsg.) ; ... (Hrsg.): Materials and processes for nonvolatile memories (symposium Boston, Massachusetts November 30 - December 2 2004). - proceedings. Warrendale, Pa. : Materials Research Society, 2005, S. 319 - 324 (Materials Research Society symposium proceedings 830)

2004

Buchbeitrag
Wennmacher, Christian;  Mikuta, Reinhard;  Kuhlemann, Gerd;  Burte, Edmund P. 

Integriertes IR-Sensorarray für die Personenerfassung.
In: Bundesministerium für Bildung und Forschung (Veranst.) ; GMM VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik (Veranst.): Mikrosystemtechnik-Kongress 2005 (Freiburg 10. bis 12. Oktober 2005). Berlin [u.a.] : VDE-Verl., 2005, S. 793 - 794

Originalartikel in begutachteter internationaler Zeitschrift
Kalkofen, Bodo;  Lisker, Marco;  Burte, Edmund P. 

A simple two-step phosphorus doping process for shallow junctions by applying a controlled adsorption and a diffusion in an oxidising ambient.
In: Materials science &amp;amp;amp;amp;amp;amp; engineering, B = Solid state materials for advanced technology [New York, NY] 114/115(2004), S. 362 - 366

Silinskas, Mindaugas;  Lisker, Marco;  Kalkofen, Bodo;  Matichyn, Serliny;  Burte, Edmund P. 

MOCVD kinetics of strontium bismuth tantalate thin film growth.
In: Lithuanian journal of physics = Lietuvos fiziko zurnalas [Vilnus] 44(2004), Nr. 5, S. 375 379

Originalartikel in begutachteter zeitschriftenartiger Reihe
Kalkofen, Bodo;  Lisker, Marco;  Burte, Edmund P. 

A simple two-step phosphorus doping process for shallow junctions by applying a controlled adsorption and a diffusion in an oxidising ambient.
In: Mannino, Giovanni (Hrsg.) ; ... (Hrsg.): Materials science issues in advanced CMOS source- drain engineering (symposium b Strasbourg, France 2004). - proceedings. Amsterdam [u.a.] : Elsevier, 2004, S. 362 - 366 (European materials research society symposia proceedings 159)

2000

Artikel in Kongressband
Wennmacher, Christian;  Mikuta, Reinhard;  Burte, Edmund P. 

Weather monitoring system for intelligent building control.
In: Technische Universität München (Veranst.): EIB event 2000 (Scientific conference München October 4 &amp;amp;amp;amp;amp;amp; 5, 2000). München, 2000, [4 S.]

Kooperationen
  • Universalbeschichtungen GmbH Wolfen
  • Siegert electronic GmbH
  • Lehrstuhl Anorganische Chemie(Prof. Frank T. Edelmann)
  • bachmann monitoring GmbH Rudolstadt
  • Angaris, Halle
  • Dittrich Elektronik GmbH
  • Sentech Instruments GmbH
Profil
  • Halbleitertechnologie
  • Photovoltaik
  • Sensorentwicklung für
    • automatisierte Gebäudeklimasteuerung
    • Personenerfassung mit Infrarot
Service
Beratung, Projekte und Gutachten zum Themenbereich Halbleitertechnologie
  • Reinigungsprozesse an Siliciumoberflächen
  • Herstellung und Charakterisierung dünner Oberflächenschichten
Vita
seit 1998Professor für Halbleitertechnologie an der Otto-von-Guericke-Universität Magdeburg
1988 - 1998Fraunhofer Gesellschaft Institut Integrierte Schaltungen IIS-B Erlangen
1984 - 1988Semikron GmbH Nürnberg
1979 - 1984Doktorand am Lehrstuhl für Elektronische Bauelemente der FAU Erlangen Nürnberg
1975 - 1979Studium Mathematik und Physik an der Friedrich-Alexander-Universität Erlangen Nürnberg
Presse
Professor Dr.-Ing. Edmund P. Burte ist Inhaber des Lehrstuhls Halbleitertechnologie an der Fakultät für Elektrotechnik und Informationstechnik der Otto-von-Guericke-Universität Magdeburg. In seiner Forschung beschäftigt sich Prof. Burte mit der Entwicklung neuer Prozesse für die Halbleitertechnologie und der Verbesserung bereits bekannter Prozesse. Schwerpunkte bilden dabei die Reinigung von Silicium-Oberflächen und die Abscheidung dünner Schichten aus geeigneten gasförmigen Ausgangsprodukten. Die dabei gewonnenen Ergebnisse fließen u.a. ein in die Entwicklung neuer, schnellerer Speicherbauelemente mit geringerem Energiebedarf für zukünftige Rechnergenerationen, in die Entwicklung von Sensoren für die Gebäudeleittechnik, für die Verbesserung der Betriebsführung von Windenergieanlagen und für den Automobilbau.

Letzte Änderung: 28.08.2017 - Ansprechpartner:

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